Dr. Nan Fu
Member of Technical Staff at GLOBALFOUNDRIES Inc
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 5 October 2016
Proc. SPIE. 9985, Photomask Technology 2016
KEYWORDS: Wafer-level optics, Lithography, Optical properties, Computer simulations, Photomasks, Optical proximity correction, Optical alignment, Geometrical optics, Algorithm development, Semiconducting wafers

Proceedings Article | 23 October 2015
Proc. SPIE. 9635, Photomask Technology 2015
KEYWORDS: Lithography, Reticles, Logic, Data modeling, Silicon, Photomasks, Optical proximity correction, Critical dimension metrology, Semiconducting wafers, Tolerancing

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