Free volume theory and a model of polymerization kinetics are introduced to predict and analyze the curing shrinkage and kinetic parameters of an acrylate-based ultraviolet-embossing resist. Curing shrinkage tests have been designed and performed to verify the accuracy of the model. The experimental results are in good agreement with the simulated results of the conversion behavior. The reaction coefficients of polymerization predicted by this model are essentially correct when compared to the classical experimental values. Moreover, the dynamic shrinkage during polymerization determined experimentally matches the simulated result predicted by our model.
Micro lens array used in parallel laser direct writing process is fabricated with UV imprinting and dry etching. Experiment results show that the relief of fabrication result is confirmed with that of original stamp. And the optical character test experiments show that the focused spot array under both writing laser and focusing test laser is similar. And the single spot profile under both writing laser and focusing test laser is also similar.