Dr. Nan Liu
at Harbin Institute of Technology
SPIE Involvement:
Author
Publications (2)

SPIE Journal Paper | May 10, 2013
JM3 Vol. 12 Issue 02
KEYWORDS: Polymerization, Oxygen, FT-IR spectroscopy, Polymers, Diffusion, Photoresist processing, Ultraviolet radiation, Process control, Process modeling, Optoelectronics

PROCEEDINGS ARTICLE | January 31, 2013
Proc. SPIE. 8759, Eighth International Symposium on Precision Engineering Measurement and Instrumentation
KEYWORDS: Silica, Lenses, Dry etching, Ultraviolet radiation, Optical fabrication, Optical testing, Reactive ion etching, Molybdenum, Optical arrays, UV optics

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