Dr. Nancy Iwamoto
Modeling/Simulation at Honeywell Performance Materials
SPIE Involvement:
Author
Publications (4)

PROCEEDINGS ARTICLE | September 11, 2007
Proc. SPIE. 6645, Nanoengineering: Fabrication, Properties, Optics, and Devices IV
KEYWORDS: Microelectromechanical systems, Thin films, FT-IR spectroscopy, Data modeling, Quartz, Glasses, Dielectrics, Silicon, Microelectronics, Silicates

PROCEEDINGS ARTICLE | May 4, 2005
Proc. SPIE. 5753, Advances in Resist Technology and Processing XXII
KEYWORDS: Lithography, Optical lithography, Etching, Polymers, Silicon, Reflectivity, Photoresist materials, Wet etching, Plasma etching, Plasma

PROCEEDINGS ARTICLE | June 12, 2003
Proc. SPIE. 5039, Advances in Resist Technology and Processing XX
KEYWORDS: Lithography, Optical lithography, Etching, Copper, Dielectrics, Reflectivity, Photoresist materials, Plasma etching, Silicon carbide, Plasma

PROCEEDINGS ARTICLE | April 27, 1993
Proc. SPIE. 1853, Organic and Biological Optoelectronics
KEYWORDS: Warfare, Chemical species, Polymers, Hydrogen, Chemistry, Resistance, Chromophores, Nonlinear optics, Deposition processes, Biological research

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