Dr. Nancy C. Zhou
at IBM Corp
SPIE Involvement:
Author
Publications (6)

PROCEEDINGS ARTICLE | September 25, 2010
Proc. SPIE. 7823, Photomask Technology 2010
KEYWORDS: Roads, Visualization, Manufacturing, Inspection, Heart, Bone, Pellicles, Photomasks, Visual communications, Failure analysis

PROCEEDINGS ARTICLE | May 25, 2010
Proc. SPIE. 7748, Photomask and Next-Generation Lithography Mask Technology XVII
KEYWORDS: Lithography, Quartz, Manufacturing, Inspection, Distortion, Pellicles, Frequency modulation, Photomasks, Fermium, Adhesives

PROCEEDINGS ARTICLE | May 25, 2010
Proc. SPIE. 7748, Photomask and Next-Generation Lithography Mask Technology XVII
KEYWORDS: Interferometers, Glasses, Chromium, Distortion, Pellicles, Photomasks, Helium neon lasers, Adhesives, Current controlled current source

PROCEEDINGS ARTICLE | May 11, 2009
Proc. SPIE. 7379, Photomask and Next-Generation Lithography Mask Technology XVI
KEYWORDS: Lithium, Quartz, Chromium, Distortion, Pellicles, Photomasks, Adhesives, Phase shifts, Current controlled current source

PROCEEDINGS ARTICLE | May 11, 2009
Proc. SPIE. 7379, Photomask and Next-Generation Lithography Mask Technology XVI
KEYWORDS: Optical lithography, Switching, Polymers, Manufacturing, Distortion, Cobalt, Pellicles, Photomasks, Aluminum, Adhesives

PROCEEDINGS ARTICLE | October 17, 2008
Proc. SPIE. 7122, Photomask Technology 2008
KEYWORDS: Data modeling, Lenses, Inspection, Distortion, Pellicles, Transmittance, Photomasks, Fermium, Immersion lithography, Adhesives

Showing 5 of 6 publications
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