Dr. Naoki Fukutake
at Nikon Corp
SPIE Involvement:
Author
Publications (5)

PROCEEDINGS ARTICLE | February 20, 2018
Proc. SPIE. 10500, Single Molecule Spectroscopy and Superresolution Imaging XI
KEYWORDS: Confocal microscopy, Point spread functions, Super resolution, Microscopy, Luminescence, Signal processing, Nonlinear optics, Optical resolution, Laser beam diagnostics, Signal detection

PROCEEDINGS ARTICLE | February 20, 2018
Proc. SPIE. 10500, Single Molecule Spectroscopy and Superresolution Imaging XI
KEYWORDS: Oscillators, Luminescence, Fourier transforms, Signal detection, Absorption

PROCEEDINGS ARTICLE | March 24, 2006
Proc. SPIE. 6152, Metrology, Inspection, and Process Control for Microlithography XX
KEYWORDS: Optical microscopes, Diffraction, Optical transfer functions, Photon counting, Light sources, Imaging systems, Crystals, Image resolution, Optical resolution, Nonlinear crystals

PROCEEDINGS ARTICLE | May 12, 2004
Proc. SPIE. 5754, Optical Microlithography XVIII
KEYWORDS: Lithography, Diffraction, Optical transfer functions, Super resolution, Photons, Crystals, Image resolution, Quantum physics, Nonlinear crystals, Absorption

PROCEEDINGS ARTICLE | June 26, 2003
Proc. SPIE. 5040, Optical Microlithography XVI
KEYWORDS: Lithography, Diffraction, Light sources, Reticles, Optical lithography, Interferometers, Crystals, Interferometry, Photomasks, Absorption

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