Naoki Kiyohara
at Canon Inc
SPIE Involvement:
Author
Publications (4)

Proceedings Article | 30 April 2023 Presentation
Proceedings Volume 12495, 124950N (2023) https://doi.org/10.1117/12.2657058
KEYWORDS: Nanoimprint lithography, Optical lithography, Ultraviolet radiation, Physics, Performance modeling, Nanotechnology, Manufacturing equipment, Manufacturing, Lithography, Device simulation

SPIE Journal Paper | 4 January 2022
JM3, Vol. 21, Issue 01, 011005, (January 2022) https://doi.org/10.1117/12.10.1117/1.JMM.21.1.011005
KEYWORDS: Nanoimprint lithography, Photoresist processing, Computer simulations, Distortion, Manufacturing, Head, Solids, Optical lithography, High volume manufacturing, Resistance

Proceedings Article | 21 September 2020 Presentation
Proceedings Volume 11518, 115180V (2020) https://doi.org/10.1117/12.2574629
KEYWORDS: Nanoimprint lithography, Photomasks, Manufacturing, Optical lithography, Stochastic processes, Computational lithography, Semiconductor manufacturing, Semiconductors, Photoresist processing, Ultraviolet radiation

Proceedings Article | 23 March 2020 Paper
Proceedings Volume 11328, 113280N (2020) https://doi.org/10.1117/12.2551999
KEYWORDS: Nanoimprint lithography, Computer simulations, Photoresist processing, Manufacturing, Distortion, High volume manufacturing, Solids, Overlay metrology, Fluid dynamics

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