Dr. Naotada Okada
Senior fellow at Toshiba Corp.
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 24 March 2009 Paper
Proc. SPIE. 7272, Metrology, Inspection, and Process Control for Microlithography XXIII
KEYWORDS: Finite-difference time-domain method, Defect detection, Polarization, Dielectrics, Inspection, Optical inspection, Near field, Optical simulations, Near field optics, Defect inspection

Proceedings Article | 19 February 2003 Paper
Proc. SPIE. 4830, Third International Symposium on Laser Precision Microfabrication
KEYWORDS: Semiconductors, Signal attenuation, Silicon, Laser processing, Nd:YAG lasers, Laser marking, Semiconductor lasers, Finite element methods, Transmittance, Optical simulations

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