Naoto Sugino
at Sanko Gosei Ltd
SPIE Involvement:
Author
Publications (12)

Proceedings Article | 9 October 2018
Proc. SPIE. 10787, Environmental Effects on Light Propagation and Adaptive Systems
KEYWORDS: Microelectromechanical systems, Confocal microscopy, Lithography, Microscopes, Metals, Glasses, Ultraviolet radiation, Electronic components, 3D printing, Nanoimprint lithography

Proceedings Article | 9 October 2018
Proc. SPIE. 10787, Environmental Effects on Light Propagation and Adaptive Systems
KEYWORDS: Microelectromechanical systems, Metals, X-rays, Digital cameras, 3D printing, Printing, Computed tomography, Laser cutting, Nanoimprint lithography, X-ray imaging

Proceedings Article | 19 March 2018
Proc. SPIE. 10584, Novel Patterning Technologies 2018
KEYWORDS: Lithography, Optical lithography, Quartz, Ultraviolet radiation, Silicon, Oxygen, Scanning electron microscopy, Nanofibers, Nanoimprint lithography, Industrial chemicals

Proceedings Article | 31 August 2017
Proc. SPIE. 10354, Nanoengineering: Fabrication, Properties, Optics, and Devices XIV
KEYWORDS: Lithography, Nanostructures, Contamination, Ultraviolet radiation, Nanoimprint lithography, Photoresist processing, Nanoelectronics, Natural surfaces

Proceedings Article | 31 August 2017
Proc. SPIE. 10354, Nanoengineering: Fabrication, Properties, Optics, and Devices XIV
KEYWORDS: Metals, Crystals, Composites, Silicon, Crystallography

Showing 5 of 12 publications
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