This paper describes the replication of a precision sinusoidal grid surface, which is used as the measurement reference of a surface encoder for measurement of planar motions. The profile of the grid surface is a superposition of sinusoidal waves in the X-direction and the Y-direction with spatial wavelengths of a hundred micrometers and amplitudes of a hundred nanometers. The master surface is fabricated on a diamond turning machine equipped with a fast tool servo. Two kinds of replication methods, the hot embossing and UV casting are employed for replicating the grid surface on polymer materials. The replication on a glass plate is also carried out by UV-casting. The replication systems and some experimental results are presented.