Mr. Naoyoshi Hatakeyama
Senior Coordinator at Idemitsu Chemicals USA
SPIE Involvement:
Author
Websites:
Publications (2)

PROCEEDINGS ARTICLE | April 4, 2008
Proc. SPIE. 6923, Advances in Resist Materials and Processing Technology XXV
KEYWORDS: Lithography, Refractive index, Transparency, Optical lithography, Polymers, Glasses, Sulfur, Extreme ultraviolet lithography, Immersion lithography, Radium

PROCEEDINGS ARTICLE | March 27, 2008
Proc. SPIE. 6923, Advances in Resist Materials and Processing Technology XXV
KEYWORDS: Lithography, Refractive index, Transparency, Magnesium, Chemical species, Polymers, Sulfur, Atomic force microscopy, Line edge roughness, Radium

SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Back to Top