Naoyoshi Hatakeyama
Senior Coordinator at Idemitsu Chemicals USA
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Publications (2)

Proceedings Article | 4 April 2008
Proc. SPIE. 6923, Advances in Resist Materials and Processing Technology XXV
KEYWORDS: Glasses, Lithography, Refractive index, Polymers, Transparency, Extreme ultraviolet lithography, Radium, Optical lithography, Immersion lithography, Sulfur

Proceedings Article | 27 March 2008
Proc. SPIE. 6923, Advances in Resist Materials and Processing Technology XXV
KEYWORDS: Polymers, Refractive index, Magnesium, Chemical species, Transparency, Radium, Lithography, Line edge roughness, Sulfur, Atomic force microscopy

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