Narendra V. Lakamraju
at
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | August 16, 2004
Proc. SPIE. 5455, MEMS, MOEMS, and Micromachining
KEYWORDS: Microelectromechanical systems, Gold, Oxides, Switches, Waveguides, Electrodes, Silicon, Resistance, Magnetism, Capacitance

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