Narendra Singh Mehta
at Texas Instruments Inc.
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 29 December 2005
Proc. SPIE. 6037, Device and Process Technologies for Microelectronics, MEMS, and Photonics IV
KEYWORDS: Oxides, Metrology, Dielectrics, Silicon, Doping, Capacitance, Process control, Transistors, Semiconducting wafers, Arsenic

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