We have developed a compressive hyperspectral imaging system that is based on single-pixel camera architecture. We have incorporated the developed system in a scanning white-light interferometer (SWLI) and showed that replacing SWLI’s CCD-based camera by the compressive hyperspectral imaging system, we have access to high-resolution multispectral images of interferometer’s fringes. Using these multi-spectral images, the system is capable of simultaneous spectroscopy of the surface, which can be used, for example, to eliminate the effect of surface contamination and providing new spectral information for fringe signal analysis which could be used to reduce the need for vertical scan, therefore making height measurement more tolerant to object’s position.
A novel spectral imaging technique is introduced based on a highly dispersive imaging lens system. The chromatic aberration of the lens system is utilized to spread the spectral content of the object over a focal distance. Two three-dimensional surface reconstruction algorithms, depth from focus and depth from defocus, are applied to images captured by dispersive lens system. Using these algorithms, the spectral imager is able to relate either the location of focused image or the amount of defocus at the imaging detector to the spectral content of the object. A spectral imager with ~5 nm spectral resolution is designed based on this technique. The spectral and spatial resolutions of the introduced technique are independent and can be improved simultaneously. Simulation and experimental results are presented.