Dr. Nassima Zeggaoui
Technical Manager Advanced Solutions at Siemens EDA
SPIE Involvement:
Publications (10)

Proceedings Article | 10 April 2024 Presentation + Paper
Proceedings Volume 12954, 1295417 (2024) https://doi.org/10.1117/12.3011100
KEYWORDS: Photomasks, Resolution enhancement technologies, SRAF, Optical proximity correction, Manufacturing, Lithography, Tunable filters, Industry, Extreme ultraviolet, Semiconducting wafers

Proceedings Article | 21 November 2023 Poster + Paper
Mary Zuo, Kushlendra Mishra, Rachit Sharma, Ingo Bork, Nassima Zeggaoui
Proceedings Volume 12751, 127511F (2023) https://doi.org/10.1117/12.2687892
KEYWORDS: SRAF, Optical proximity correction, Bias correction, Printing, Semiconducting wafers, Histograms, Model-based design, Design and modelling, Manufacturing, Industry

Proceedings Article | 1 December 2022 Presentation + Paper
Y. Xu, J. Hou, N. Zeggaoui, Y. Sun, J. Lei
Proceedings Volume 12293, 1229306 (2022) https://doi.org/10.1117/12.2642989
KEYWORDS: SRAF, Photomasks, Semiconducting wafers, Optical proximity correction, Printing, Model-based design, Lithography, Extreme ultraviolet, Resolution enhancement technologies, Process modeling

Proceedings Article | 22 February 2021 Presentation + Paper
Proceedings Volume 11613, 116130M (2021) https://doi.org/10.1117/12.2585172
KEYWORDS: Design for manufacturability, Manufacturing, Resolution enhancement technologies, Photonics, Visualization, Telecommunications, Optics manufacturing, Optical interconnects, New and emerging technologies, Microelectronics

Proceedings Article | 24 March 2017 Presentation + Paper
N. Zeggaoui, B. Orlando, G. Kerrien, V. Farys, E. Yesilada, S. Cremer, A. Tritchkov, V. Liubich
Proceedings Volume 10147, 1014711 (2017) https://doi.org/10.1117/12.2257906
KEYWORDS: Optical proximity correction, Waveguides, Photomasks, Optical lithography, Photonic integrated circuits, Lithography, Manufacturing, Resolution enhancement technologies, SRAF, Photonic devices, Etching, Semiconducting wafers

Showing 5 of 10 publications
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