Dr. Natalia Malkova Profile

Dr. Natalia Malkova

at KLA Corp

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Publications (2)

Proceedings Article | 13 March 2018 Paper

Tracking the defects of ultra-thin HfO2 using a Cody-Lorentz multiple oscillator model

Dawei Hu, Aaron Rosenberg, Houssam Chouaib, Natalia Malkova, Zhengquan Tan

Proceedings Volume 10585, 105852Y (2018) https://doi.org/10.1117/12.2296980

KEYWORDS: Hybrid fiber optics, Semiconducting wafers, Annealing, Dielectrics, Magnesium, Oscillators, Silicon, Diffractive optical elements, Data modeling, Spectroscopic ellipsometry

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Proceedings Article | 13 April 2005 Paper

Control of light propagation through sharp bend waveguide based on two-dimensional photonic crystal

Natalia Malkova, Cun-Zheng Ning

Proceedings Volume 5733, (2005) https://doi.org/10.1117/12.589431

KEYWORDS: Waveguides, Distortion, Light wave propagation, Photonic crystals, Solids, Transmittance, Dispersion, Crystals, Dielectrics, Solid modeling

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