Dr. Natalia Malkova
at KLA-Tencor Corp
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | March 13, 2018
Proc. SPIE. 10585, Metrology, Inspection, and Process Control for Microlithography XXXII
KEYWORDS: Magnesium, Oscillators, Diffractive optical elements, Data modeling, Annealing, Dielectrics, Silicon, Spectroscopic ellipsometry, Semiconducting wafers, Hybrid fiber optics

PROCEEDINGS ARTICLE | April 13, 2005
Proc. SPIE. 5733, Photonic Crystal Materials and Devices III
KEYWORDS: Waveguides, Dispersion, Crystals, Dielectrics, Photonic crystals, Distortion, Solids, Transmittance, Solid modeling, Light wave propagation

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