Nataliya Vorbringer-Dorozhovets
at Technische Univ Ilmenau
SPIE Involvement:
Author
Publications (9)

Proceedings Article | 26 March 2013
Proc. SPIE. 8680, Alternative Lithographic Technologies V
KEYWORDS: Lithography, Optical lithography, Scanners, Silicon, Inspection, Scanning probe lithography, Atomic force microscopy, Photomasks, Optical alignment, Nanoelectronics

Proceedings Article | 25 August 2010
Proc. SPIE. 7767, Instrumentation, Metrology, and Standards for Nanomanufacturing IV
KEYWORDS: Optical components, Beam splitters, Metrology, Optical spheres, Interferometers, Sensors, Silicon, Interferometry, Head, 3D metrology

Proceedings Article | 22 May 2009
Proc. SPIE. 7378, Scanning Microscopy 2009
KEYWORDS: Mirrors, Beam splitters, Metrology, Interferometers, Calibration, Monte Carlo methods, Distance measurement, Scanning probe microscopy, Thermal modeling, Scanning probe microscopes

Proceedings Article | 18 June 2007
Proc. SPIE. 6616, Optical Measurement Systems for Industrial Inspection V
KEYWORDS: Mirrors, Metrology, Interferometers, Calibration, Atomic force microscopy, Homodyne detection, Scanning probe microscopy, Standards development, Scanning probe microscopes, Piezoelectric drives

Proceedings Article | 18 June 2007
Proc. SPIE. 6616, Optical Measurement Systems for Industrial Inspection V
KEYWORDS: Mirrors, Metrology, Interferometers, Sensors, Atomic force microscopy, Nanoprobes, Optical testing, Spatial resolution, Helium neon lasers, Mechatronics

Proceedings Article | 25 October 2006
Proc. SPIE. 6280, Third International Symposium on Precision Mechanical Measurements
KEYWORDS: Microscopes, Mirrors, Metrology, Interferometers, Sensors, Atomic force microscopy, Nanoprobes, Optical testing, Spatial resolution, Sensor technology

Showing 5 of 9 publications
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