Dr. Nathalie Bouet
Scientist at Brookhaven National Lab
SPIE Involvement:
Author
Publications (7)

PROCEEDINGS ARTICLE | September 7, 2017
Proc. SPIE. 10389, X-Ray Nanoimaging: Instruments and Methods III
KEYWORDS: Gold, X-ray optics, Sputter deposition, X-rays, Interfaces, Image transmission, Charge-coupled devices, Zone plates, Monochromators, Phase shifts

PROCEEDINGS ARTICLE | March 28, 2017
Proc. SPIE. 10145, Metrology, Inspection, and Process Control for Microlithography XXXI
KEYWORDS: Fabrication, Semiconductors, Diffraction, Metrology, Imaging systems, Spatial frequencies, Silicon, Optical fabrication, Scanning electron microscopy, Transmission electron microscopy, Software development, Contrast transfer function

PROCEEDINGS ARTICLE | October 19, 2012
Proc. SPIE. 8502, Advances in X-Ray/EUV Optics and Components VII
KEYWORDS: Multilayers, X-ray optics, Metrology, Sputter deposition, X-rays, Silicon, Nitrogen, Reflectivity, Control systems, Scanning electron microscopy

SPIE Journal Paper | September 1, 2011
OE Vol. 50 Issue 09
KEYWORDS: Modulation transfer functions, Calibration, Transmission electron microscopy, Scanning electron microscopy, Electron microscopes, Binary data, Interferometers, Profilometers, Spatial frequencies, Microscopes

PROCEEDINGS ARTICLE | September 29, 2010
Proc. SPIE. 7802, Advances in X-Ray/EUV Optics and Components V
KEYWORDS: X-ray optics, Etching, Ions, Silicon, Chemistry, Plasma etching, Zone plates, Reactive ion etching, Anisotropic etching, Plasma

PROCEEDINGS ARTICLE | September 2, 2010
Proc. SPIE. 7801, Advances in Metrology for X-Ray and EUV Optics III
KEYWORDS: Spatial frequencies, Interferometers, Calibration, Silicon, Interferometry, Electron microscopes, Scanning electron microscopy, Transmission electron microscopy, Modulation transfer functions, Binary data

Showing 5 of 7 publications
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