Dr. Nathalie Bouet
Scientist at Brookhaven National Lab
SPIE Involvement:
Publications (7)

PROCEEDINGS ARTICLE | September 7, 2017
Proc. SPIE. 10389, X-Ray Nanoimaging: Instruments and Methods III
KEYWORDS: Gold, Zone plates, Image transmission, X-rays, Phase shifts, Monochromators, Charge-coupled devices, X-ray optics, Interfaces, Sputter deposition

Proc. SPIE. 10145, Metrology, Inspection, and Process Control for Microlithography XXXI
KEYWORDS: Metrology, Imaging systems, Contrast transfer function, Software development, Scanning electron microscopy, Semiconductors, Silicon, Diffraction, Spatial frequencies, Transmission electron microscopy, Optical fabrication, Fabrication

PROCEEDINGS ARTICLE | October 19, 2012
Proc. SPIE. 8502, Advances in X-Ray/EUV Optics and Components VII
KEYWORDS: Multilayers, Sputter deposition, Nitrogen, Scanning electron microscopy, Silicon, Reflectivity, X-ray optics, X-rays, Metrology, Control systems

SPIE Journal Paper | September 1, 2011
OE Vol. 50 Issue 09
KEYWORDS: Modulation transfer functions, Calibration, Transmission electron microscopy, Scanning electron microscopy, Electron microscopes, Binary data, Interferometers, Profilometers, Spatial frequencies, Microscopes

PROCEEDINGS ARTICLE | September 29, 2010
Proc. SPIE. 7802, Advances in X-Ray/EUV Optics and Components V
KEYWORDS: Etching, Reactive ion etching, Silicon, Chemistry, Anisotropic etching, Plasma etching, Ions, Plasma, X-ray optics, Zone plates

PROCEEDINGS ARTICLE | September 2, 2010
Proc. SPIE. 7801, Advances in Metrology for X-Ray and EUV Optics III
KEYWORDS: Modulation transfer functions, Transmission electron microscopy, Scanning electron microscopy, Calibration, Binary data, Interferometers, Electron microscopes, Silicon, Spatial frequencies, Interferometry

Showing 5 of 7 publications
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