Dr. Nathalie Bouet
Scientist at Brookhaven National Lab
SPIE Involvement:
Publications (9)

PROCEEDINGS ARTICLE | September 29, 2017
Proc. SPIE. 10389, X-Ray Nanoimaging: Instruments and Methods III
KEYWORDS: Microscopes, Diffraction, Phase contrast, Imaging systems, Luminescence, Nanoprobes, Scanning probe microscopy, Hard x-rays, Scanning probe microscopes, Absorption

PROCEEDINGS ARTICLE | September 25, 2017
Proc. SPIE. 10388, Advances in Computational Methods for X-Ray Optics IV
KEYWORDS: Mirrors, X-ray optics, X-rays, X-ray diffraction, Wavefronts, Optical testing, Phase retrieval, Zone plates, Hard x-rays, Crystal optics

PROCEEDINGS ARTICLE | September 7, 2017
Proc. SPIE. 10389, X-Ray Nanoimaging: Instruments and Methods III
KEYWORDS: Gold, X-ray optics, Sputter deposition, X-rays, Interfaces, Image transmission, Charge-coupled devices, Zone plates, Monochromators, Phase shifts

Proc. SPIE. 10145, Metrology, Inspection, and Process Control for Microlithography XXXI
KEYWORDS: Fabrication, Semiconductors, Diffraction, Metrology, Imaging systems, Spatial frequencies, Silicon, Optical fabrication, Scanning electron microscopy, Transmission electron microscopy, Software development, Contrast transfer function

PROCEEDINGS ARTICLE | October 19, 2012
Proc. SPIE. 8502, Advances in X-Ray/EUV Optics and Components VII
KEYWORDS: Multilayers, X-ray optics, Metrology, Sputter deposition, X-rays, Silicon, Nitrogen, Reflectivity, Control systems, Scanning electron microscopy

SPIE Journal Paper | September 1, 2011
OE Vol. 50 Issue 09
KEYWORDS: Modulation transfer functions, Calibration, Transmission electron microscopy, Scanning electron microscopy, Electron microscopes, Binary data, Interferometers, Profilometers, Spatial frequencies, Microscopes

Showing 5 of 9 publications
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