Dr. Nathan M. Jackson
at Univ of New Mexico
SPIE Involvement:
Conference Program Committee | Author
Publications (4)

SPIE Journal Paper | March 23, 2018
JM3 Vol. 17 Issue 01
KEYWORDS: Microelectromechanical systems, Silicon, Heart, Aluminum nitride, Energy harvesting, Thin films, Polymers, Semiconducting wafers, Beam shaping, Oxides

PROCEEDINGS ARTICLE | June 14, 2017
Proc. SPIE. 10246, Smart Sensors, Actuators, and MEMS VIII
KEYWORDS: Microelectromechanical systems, Actuators, Modeling, Robotics, Control systems, 3D modeling, Robots, Biomimetics, Finite element methods, Ferroelectric polymers

PROCEEDINGS ARTICLE | June 2, 2017
Proc. SPIE. 10246, Smart Sensors, Actuators, and MEMS VIII
KEYWORDS: Microelectromechanical systems, Actuators, Electronics, Sensors, Electrodes, Polymers, Silicon, Reliability, Heart, Energy harvesting, Finite element methods, Aluminum nitride, Beam shaping

PROCEEDINGS ARTICLE | May 17, 2013
Proc. SPIE. 8763, Smart Sensors, Actuators, and MEMS VI
KEYWORDS: Fabrication, Microelectromechanical systems, Sensors, Silicon, Resistance, Energy harvesting, Aluminum, Aluminum nitride, Deposition processes, Semiconducting wafers

Conference Committee Involvement (1)
Smart Sensors, Actuators, and MEMS VIII
8 May 2017 | Barcelona, Spain
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