Dr. Nathan M. Jackson
at Univ of New Mexico
SPIE Involvement:
Author
Publications (4)

SPIE Journal Paper | 23 March 2018
JM3 Vol. 17 Issue 01
KEYWORDS: Microelectromechanical systems, Silicon, Heart, Aluminum nitride, Energy harvesting, Thin films, Polymers, Semiconducting wafers, Beam shaping, Oxides

Proceedings Article | 14 June 2017
Proc. SPIE. 10246, Smart Sensors, Actuators, and MEMS VIII
KEYWORDS: Microelectromechanical systems, Biomimetics, Finite element methods, 3D modeling, Modeling, Robots, Actuators, Ferroelectric polymers, Control systems, Robotics

Proceedings Article | 2 June 2017
Proc. SPIE. 10246, Smart Sensors, Actuators, and MEMS VIII
KEYWORDS: Electronics, Beam shaping, Reliability, Electrodes, Heart, Energy harvesting, Microelectromechanical systems, Aluminum nitride, Finite element methods, Sensors, Silicon, Polymers, Actuators

Proceedings Article | 17 May 2013
Proc. SPIE. 8763, Smart Sensors, Actuators, and MEMS VI
KEYWORDS: Aluminum nitride, Microelectromechanical systems, Energy harvesting, Sensors, Semiconducting wafers, Silicon, Fabrication, Aluminum, Deposition processes, Resistance

Conference Committee Involvement (1)
Smart Sensors, Actuators, and MEMS VIII
8 May 2017 | Barcelona, Spain
SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Advertisement
Advertisement
Back to Top