Nathan D. Jarnagin
Graduate Student at
SPIE Involvement:
Author
Publications (9)

PROCEEDINGS ARTICLE | April 5, 2013
Proc. SPIE. 8680, Alternative Lithographic Technologies V
KEYWORDS: Etching, Polymers, Annealing, Silicon, Scanning electron microscopy, Solids, Polymerization, Directed self assembly, Picosecond phenomena, Semiconducting wafers

PROCEEDINGS ARTICLE | April 5, 2013
Proc. SPIE. 8680, Alternative Lithographic Technologies V
KEYWORDS: Lithography, FT-IR spectroscopy, Magnesium, Optical lithography, Etching, Polymers, Annealing, Solids, Polymerization, Directed self assembly

PROCEEDINGS ARTICLE | April 5, 2013
Proc. SPIE. 8680, Alternative Lithographic Technologies V
KEYWORDS: Thin films, Polymers, Glasses, Annealing, Nitrogen, Scanning electron microscopy, Polymerization, Directed self assembly, Picosecond phenomena, Polymer thin films

PROCEEDINGS ARTICLE | April 16, 2012
Proc. SPIE. 8323, Alternative Lithographic Technologies IV
KEYWORDS: Lithography, FT-IR spectroscopy, Optical lithography, Polymers, Glasses, Annealing, Scanning electron microscopy, Polymerization, Directed self assembly, Molecular self-assembly

PROCEEDINGS ARTICLE | April 16, 2012
Proc. SPIE. 8323, Alternative Lithographic Technologies IV
KEYWORDS: Lithography, Optical lithography, Etching, Polymers, Annealing, Solids, Polymerization, Directed self assembly, Plasma etching, Plasma

PROCEEDINGS ARTICLE | March 23, 2007
Proc. SPIE. 6519, Advances in Resist Materials and Processing Technology XXIV
KEYWORDS: Lithography, Optical lithography, Etching, Polymers, Resistance, Photoresist materials, Polymerization, Line edge roughness, Fluorine, Semiconducting wafers

Showing 5 of 9 publications
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