Dr. Nathan Marchack
Research Staff Member at IBM Thomas J Watson Research Ctr
SPIE Involvement:
Author
Publications (4)

Proceedings Article | 17 May 2019
Proc. SPIE. 11010, Chemical, Biological, Radiological, Nuclear, and Explosives (CBRNE) Sensing XX
KEYWORDS: Fabry–Perot interferometers, Waveguides, Sensors, Spectroscopy, Silicon, Semiconductor lasers, Sensor networks, Photonic integrated circuits, Silicon photonics, Integrated photonics

Proceedings Article | 16 May 2018
Proc. SPIE. 10629, Chemical, Biological, Radiological, Nuclear, and Explosives (CBRNE) Sensing XIX
KEYWORDS: Photodetectors, Methane, Optical sensors, Sensors, Calibration, Spectroscopy, Absorbance, Absorption spectroscopy, Absorption

Proceedings Article | 21 March 2017
Proc. SPIE. 10149, Advanced Etch Technology for Nanopatterning VI
KEYWORDS: Lithography, Optical lithography, Waveguides, Sensors, Etching, Silicon, Photomasks, Line width roughness, Integrated circuits, Plasma etching, Silicon photonics, Line edge roughness, Reactive ion etching, Sensor technology, Waveguide sensors, Plasma

Proceedings Article | 23 March 2016
Proc. SPIE. 9782, Advanced Etch Technology for Nanopatterning V
KEYWORDS: Oxides, Optical lithography, Etching, Chemistry, Line width roughness, Critical dimension metrology, Line edge roughness, Plasma, Tin

SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Advertisement
Advertisement
Back to Top