Dr. Nathaniel A. Lynd
at Univ of Texas at Austin
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 25 March 2019
Proc. SPIE. 10960, Advances in Patterning Materials and Processes XXXVI
KEYWORDS: Optical lithography, Polymers, Image resolution, Photoresist materials, Photoresist developing, Astatine

Proceedings Article | 25 March 2019
Proc. SPIE. 10960, Advances in Patterning Materials and Processes XXXVI
KEYWORDS: Lithography, Polymers, Chemistry, Manufacturing, Chromium, Photomasks, Directed self assembly, High volume manufacturing, Nanoimprint lithography, Photoresist processing

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