Mr. Natsuhiko Mizutani Profile

Natsuhiko Mizutani

Scientist at Canon Inc

SPIE Involvement:

Author

Publications (3)

Proceedings Article | 2 April 2007 Paper

Photo-deprotection resist based on photolysis of o-nitrobenzyl phenol ether; challenge to half-pitch 22 nm using near-field lithography

T. Ito, A. Terao, Y. Inao, T. Yamaguchi, N. Mizutani

Proceedings Volume 6519, 65190J (2007) https://doi.org/10.1117/12.711276

KEYWORDS: Photoresist materials, Near field, Lithography, Infrared spectroscopy, Line edge roughness, Photoresist processing, Photolysis, Silicon, Etching, Diffusion

Read Abstract +

Proceedings Article | 14 November 1997 Paper

Effect of segregation on the formation of bifunctional interface layers in solid electrolytes

N. Mizutani, J. Nowotny

Proceedings Volume 3241, (1997) https://doi.org/10.1117/12.293497

KEYWORDS: Zirconium dioxide, Interfaces, Oxygen, Electrodes, Solids, Oxides, Chemistry, Doping, Electrons, Ions

Read Abstract +

Proceedings Article | 14 November 1997 Paper

Effect of segregation on the formation of bifunctional interface layer in solid electrolytes

N. Mizutani, J. Nowotny

Proceedings Volume 3241, (1997) https://doi.org/10.1117/12.293522

KEYWORDS: Interfaces, Zirconium dioxide, Oxygen, Solids, Oxides, Electrodes, Chemistry, Doping, Ions, Diffusion

Read Abstract +

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years