Dr. Navab Singh
Member of Technical Staff at Institute of Microelectronics
SPIE Involvement:
Publications (11)

Proceedings Article | 13 March 2024 Presentation + Paper
Proceedings Volume 12898, 1289802 (2024) https://doi.org/10.1117/12.3002146
KEYWORDS: Silicon nitride, Waveguides, Semiconducting wafers, Plasma enhanced chemical vapor deposition, Silicon photonics, Film thickness, Fabrication, Chemical mechanical planarization, Photonic integrated circuits

Proceedings Article | 15 March 2023 Presentation + Paper
Proceedings Volume 12432, 1243205 (2023) https://doi.org/10.1117/12.2647686
KEYWORDS: Optical proximity correction, Flat optics, Critical dimension metrology, Optical lithography, Manufacturing, Lithography, Design and modelling

Proceedings Article | 5 March 2021 Presentation + Paper
Proceedings Volume 11697, 116970N (2021) https://doi.org/10.1117/12.2582707
KEYWORDS: Infrared sensors, Infrared radiation, Absorption, Thin films, Sensors, Pyroelectric detectors, Infrared detectors, Aluminum nitride, Microelectromechanical systems, Thermography

Proceedings Article | 4 March 2015 Paper
Prakash Pitchappa, Chong Pei Ho, You Qian, Yu Sheng Lin, Navab Singh, Chengkuo Lee
Proceedings Volume 9302, 93021I (2015) https://doi.org/10.1117/12.2081135
KEYWORDS: Metamaterials, Absorption, Molybdenum, Microelectromechanical systems, Silica, Infrared radiation, Electro optics, Dielectric polarization, Reflectors, Switching

SPIE Journal Paper | 1 April 2005
JM3, Vol. 4, Issue 02, 023004, (April 2005) https://doi.org/10.1117/12.10.1117/1.1898043
KEYWORDS: Photomasks, Phase shifts, Monochromatic aberrations, Reticles, Diffraction, Critical dimension metrology, Cadmium, Scattering, Optical lithography, Semiconducting wafers

Showing 5 of 11 publications
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