Mr. Navaneetha Krishnan
at Applied Materials
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | March 15, 2016
Proc. SPIE. 9780, Optical Microlithography XXIX
KEYWORDS: Lithography, Optical lithography, Dielectrophoresis, Line width roughness, Semiconductor manufacturing, Line edge roughness, Chemical mechanical planarization

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