Nazuhusna Khalid
at
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Author
Publications (3)

PROCEEDINGS ARTICLE | May 9, 2012
Proc. SPIE. 8341, Active and Passive Smart Structures and Integrated Systems 2012
KEYWORDS: Microelectromechanical systems, Transceivers, Oscillators, Capacitors, Metals, Silicon, Resistance, Telecommunications, Transistors, Integrated circuits

PROCEEDINGS ARTICLE | May 8, 2012
Proc. SPIE. 8341, Active and Passive Smart Structures and Integrated Systems 2012
KEYWORDS: Modeling, Resonators, Electrodes, Computer simulations, Cobalt, Finite element methods, Aluminum nitride, Acoustics, Ku band, Ruthenium

PROCEEDINGS ARTICLE | March 31, 2010
Proc. SPIE. 7646, Nanosensors, Biosensors, and Info-Tech Sensors and Systems 2010
KEYWORDS: Microelectromechanical systems, Metals, Silicon, Resistance, Capacitance, Sapphire, CMOS technology, Radio frequency circuits, Inductance, Patterned sapphire substrate

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