Dr. Ndubuisi G. Orji
Mechanical Engineer at National Institute of Standards and Technology
SPIE Involvement:
Conference Program Committee | Conference Co-Chair | Conference Chair | Author | Editor
Publications (46)

SPIE Journal Paper | June 19, 2017
JM3 Vol. 16 Issue 02
KEYWORDS: Calibration, Standards development, Atomic force microscopy, Atomic force microscope, Metrology, Contamination, Electron microscopes

SPIE Journal Paper | December 15, 2016
JM3 Vol. 15 Issue 04
KEYWORDS: Metrology, Scanning electron microscopy, Atomic force microscopy, Error analysis, Calibration, 3D metrology, Image segmentation, Optical proximity correction, Lithography, Composites

SPIE Journal Paper | October 13, 2016
JM3 Vol. 15 Issue 04
KEYWORDS: Critical dimension metrology, Calibration, Transmission electron microscopy, Electron microscopes, Error analysis, Silicon, Line width roughness, Oxides, Statistical analysis, Standards development

SPIE Journal Paper | August 26, 2016
JM3 Vol. 15 Issue 03
KEYWORDS: Scanning electron microscopy, Line edge roughness, Carbon nanotubes, Atomic force microscope, Metrology, Atomic force microscopy, Standards development, Silicon, Manufacturing, Ion beams

SPIE Journal Paper | March 9, 2016
JM3 Vol. 15 Issue 01
KEYWORDS: Etching, Silicon, Calibration, Crystals, Standards development, Scanning electron microscopy, Oxides, Metrology, Wet etching, Photomasks

SPIE Journal Paper | January 25, 2016
JM3 Vol. 15 Issue 01
KEYWORDS: Virtual point source, Atomic force microscope, Calibration, Metrology, Critical dimension metrology, Standards development, Atomic force microscopy, Silicon, Semiconductor manufacturing, Statistical modeling

Showing 5 of 46 publications
Conference Committee Involvement (8)
Nanoengineering: Fabrication, Properties, Optics, and Devices XII
11 August 2015 | San Diego, California, United States
Instrumentation, Metrology, and Standards for Nanomanufacturing VIII
20 August 2014 | San Diego, California, United States
Instrumentation, Metrology, and Standards for Nanomanufacturing, Optics, and Semiconductors VII
28 August 2013 | San Diego, California, United States
Instrumentation, Metrology, and Standards for Nanomanufacturing, Optics, and Semiconductors VI
13 August 2012 | San Diego, California, United States
Instrumentation, Metrology, and Standards for Nanomanufacturing, Optics, and Semiconductors V
24 August 2011 | San Diego, California, United States
Showing 5 of 8 published special sections
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