Dr. Ndubuisi G. Orji
Mechanical Engineer at National Institute of Standards and Technology
SPIE Involvement:
Author | Editor
Publications (46)

Proceedings Article | 1 April 2021 Presentation + Paper
Proc. SPIE. 11611, Metrology, Inspection, and Process Control for Semiconductor Manufacturing XXXV
KEYWORDS: Line width roughness, Wavelet transforms, Line edge roughness, Edge roughness, Microelectromechanical systems, Metrology, Lithography, Extreme ultraviolet lithography, Wavelets, Microopto electromechanical systems

Proceedings Article | 22 February 2021 Presentation
Proc. SPIE. 11611, Metrology, Inspection, and Process Control for Semiconductor Manufacturing XXXV

SPIE Journal Paper | 28 March 2020
JM3 Vol. 19 Issue 01
KEYWORDS: Silicon, Atomic force microscopy, Microscopy, Calibration, Electron beams, Critical dimension metrology, Transmission electron microscopy, Metrology, Scanning electron microscopy, Standards development

SPIE Journal Paper | 19 June 2017
JM3 Vol. 16 Issue 02
KEYWORDS: Calibration, Standards development, Atomic force microscopy, Atomic force microscope, Metrology, Contamination, Electron microscopes

SPIE Journal Paper | 15 December 2016
JM3 Vol. 15 Issue 04
KEYWORDS: Metrology, Scanning electron microscopy, Atomic force microscopy, Error analysis, Calibration, 3D metrology, Image segmentation, Optical proximity correction, Lithography, Composites

Showing 5 of 46 publications
Proceedings Volume Editor (3)

Conference Committee Involvement (8)
Nanoengineering: Fabrication, Properties, Optics, and Devices XII
11 August 2015 | San Diego, California, United States
Instrumentation, Metrology, and Standards for Nanomanufacturing VIII
20 August 2014 | San Diego, California, United States
Instrumentation, Metrology, and Standards for Nanomanufacturing, Optics, and Semiconductors VII
28 August 2013 | San Diego, California, United States
Instrumentation, Metrology, and Standards for Nanomanufacturing, Optics, and Semiconductors VI
13 August 2012 | San Diego, California, United States
Instrumentation, Metrology, and Standards for Nanomanufacturing, Optics, and Semiconductors V
24 August 2011 | San Diego, California, United States
Showing 5 of 8 Conference Committees
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