Neal R. Fornaciari
Sr. Mbr. Technical Staff at Sandia National Labs California
SPIE Involvement:
Author
Publications (4)

Proceedings Article | 1 July 2002
Proc. SPIE. 4688, Emerging Lithographic Technologies VI
KEYWORDS: Diamond, Curtains, Sensors, Electrodes, Capillaries, Particles, Lamps, Extreme ultraviolet, Aluminum nitride, Plasma

Proceedings Article | 20 August 2001
Proc. SPIE. 4343, Emerging Lithographic Technologies V
KEYWORDS: Curtains, Electrodes, Capillaries, Particles, Lamps, Xenon, Extreme ultraviolet, Extreme ultraviolet lithography, Tantalum, Plasma

Proceedings Article | 21 July 2000
Proc. SPIE. 3997, Emerging Lithographic Technologies IV
KEYWORDS: Lithography, Electrodes, Capillaries, Reflectivity, Extreme ultraviolet, Extreme ultraviolet lithography, Semiconducting wafers, Thermal modeling, Plasma, Fiber optic illuminators

Proceedings Article | 25 June 1999
Proc. SPIE. 3676, Emerging Lithographic Technologies III
KEYWORDS: Lithium, Sensors, Electrodes, Capillaries, Ions, Xenon, Extreme ultraviolet, Extreme ultraviolet lithography, Synchrotrons, Plasma

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