Dr. Ned Saleh
Co-Founder at Plasmotica LLC
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | April 4, 2012
Proc. SPIE. 8324, Metrology, Inspection, and Process Control for Microlithography XXVI
KEYWORDS: Metrology, Data modeling, Metals, Scatterometry, Extreme ultraviolet, Critical dimension metrology, Line edge roughness, Semiconducting wafers, Scatter measurement

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