Neil S. Patel
Process Engineer at Texas Instruments Inc
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 16 March 2009 Paper
Li-Heng Chou, Neil Patel, Patrick McCarthy
Proceedings Volume 7274, 72742N (2009) https://doi.org/10.1117/12.814137
KEYWORDS: Semiconducting wafers, Optical proximity correction, Scanners, Lithography, Cadmium, Computer aided design, Printing, Phase shifts, Photomasks, Resolution enhancement technologies

Proceedings Article | 25 April 2005 Paper
Neil Patel, Howard Savage, Richard Rosen, Rabindra Halder, Uladzimir Kartazayeu, Steven McCormick, Alvin Katz, Henry Perry, Robert Alfano
Proceedings Volume 5686, (2005) https://doi.org/10.1117/12.589804
KEYWORDS: Laser tissue interaction, Cornea, Laser welding, Monte Carlo methods, Absorption, Tissues, Photons, Laser systems engineering, Laser scattering, Scattering

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