Dr. Neil W. Troy
Physicist at KLA Corp
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 8 October 2020 Presentation + Paper
Proc. SPIE. 11517, Extreme Ultraviolet Lithography 2020
KEYWORDS: Wafer-level optics, Signal to noise ratio, Reticles, Inspection, Wafer inspection, Photomasks, Algorithm development, Semiconducting wafers, Optics manufacturing, Plasma

Proceedings Article | 9 March 2015 Paper
Proc. SPIE. 9355, Frontiers in Ultrafast Optics: Biomedical, Scientific, and Industrial Applications XV
KEYWORDS: Refractive index, Waveguides, Glasses, Microscopy, Zinc, Raman spectroscopy, Near field, Aluminum, Molybdenum, Near field optics

Proceedings Article | 30 January 2012 Paper
Proc. SPIE. 8247, Frontiers in Ultrafast Optics: Biomedical, Scientific, and Industrial Applications XII
KEYWORDS: Confocal microscopy, Femtosecond phenomena, Waveguides, Glasses, Luminescence, Ions, Zinc, Scanning electron microscopy, Raman spectroscopy, Ytterbium

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