Dr. Neus Sabaté
Postdoctoral Researcher at Ctr Nacional de Microelectrónica
SPIE Involvement:
Author
Publications (13)

PROCEEDINGS ARTICLE | June 1, 2015
Proc. SPIE. 9518, Bio-MEMS and Medical Microdevices II
KEYWORDS: Lithography, Biosensing, Glucose, Sensors, Electrodes, Polymers, Silicon, Semiconducting wafers, Rapid manufacturing, Nanolithography

PROCEEDINGS ARTICLE | May 21, 2015
Proc. SPIE. 9517, Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems
KEYWORDS: Oxides, Methane, Silica, Silicon, Hydrogen, Bioalcohols, Microfabrication, Semiconducting wafers, Hydrogen production, Temperature metrology

PROCEEDINGS ARTICLE | May 5, 2011
Proc. SPIE. 8066, Smart Sensors, Actuators, and MEMS V
KEYWORDS: Infrared detectors, Thermography, Modulation, Spectroscopy, Silicon, Resistance, Infrared spectroscopy, Infrared radiation, Aluminum, Temperature metrology

PROCEEDINGS ARTICLE | May 19, 2009
Proc. SPIE. 7362, Smart Sensors, Actuators, and MEMS IV
KEYWORDS: Microelectromechanical systems, Oxides, Electrodes, Annealing, X-ray diffraction, Silicon, Solids, Pulsed laser deposition, Semiconducting wafers, Zirconium dioxide

PROCEEDINGS ARTICLE | December 30, 2008
Proc. SPIE. 7268, Smart Structures, Devices, and Systems IV
KEYWORDS: Fabrication, Gas sensors, Optical lithography, Sensors, Silicon, Aluminum, Deep reactive ion etching, Palladium, Semiconducting wafers, Wafer bonding

PROCEEDINGS ARTICLE | May 17, 2007
Proc. SPIE. 6589, Smart Sensors, Actuators, and MEMS III
KEYWORDS: Gas sensors, Sensors, Glasses, Silicon, Gases, Chromium, Deep reactive ion etching, Palladium, System integration, Semiconducting wafers

Showing 5 of 13 publications
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