Mr. Ngoc V. Le
Senior Process Engineer at Motorola Inc
SPIE Involvement:
Author
Publications (5)

PROCEEDINGS ARTICLE | March 15, 2007
Proc. SPIE. 6517, Emerging Lithographic Technologies XI
KEYWORDS: Wafer-level optics, Lithography, Etching, Quartz, Particles, Manufacturing, Resistance, Scanning electron microscopy, Optical inspection, Semiconducting wafers

PROCEEDINGS ARTICLE | October 25, 2006
Proc. SPIE. 6378, Chemical and Biological Sensors for Industrial and Environmental Monitoring II
KEYWORDS: Oxides, Optical filters, Mirrors, Fabry–Perot interferometers, Etching, Digital filtering, Silicon, Reflectivity, Chromium, Dielectric filters

PROCEEDINGS ARTICLE | March 24, 2006
Proc. SPIE. 6151, Emerging Lithographic Technologies X
KEYWORDS: Oxides, Lithography, Etching, Silicon, Scanning electron microscopy, Printing, Nanoimprint lithography, Critical dimension metrology, Semiconducting wafers, Plasma

PROCEEDINGS ARTICLE | May 6, 2005
Proc. SPIE. 5751, Emerging Lithographic Technologies IX
KEYWORDS: Semiconductors, Oxides, Lithography, Etching, Metals, Silicon, Plasmas, Scanning electron microscopy, Aluminum, Semiconducting wafers

PROCEEDINGS ARTICLE | May 20, 2004
Proc. SPIE. 5374, Emerging Lithographic Technologies VIII
KEYWORDS: Oxides, Lithography, Etching, Quartz, Silicon, Scanning electron microscopy, Printing, Photomasks, Critical dimension metrology, Semiconducting wafers

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