Ms. Ni Hu Profile

Ni Hu

at National Univ of Singapore

SPIE Involvement:

Author

Publications (3)

Proceedings Article | 14 November 2007 Paper

Study on atmospheric transmittance of MODIS and FY

Ni Hu, Xiaowen Li, Shihao Tang

Proceedings Volume 6790, 67901H (2007) https://doi.org/10.1117/12.748904

KEYWORDS: Transmittance, MODIS, Atmospheric modeling, Carbon monoxide, Gases, Ozone, Oxygen, Methane, Atmospheric particles, Remote sensing

Read Abstract +

Proceedings Article | 5 April 2007 Paper

Real-time spatial control of photoresist development rate

Arthur Tay, Kuen-Yu Tsai, Weng-Khuen Ho, Ni Hu, Choon-Meng Kiew

Proceedings Volume 6518, 65182N (2007) https://doi.org/10.1117/12.711509

KEYWORDS: Photoresist developing, Photoresist materials, Semiconducting wafers, Lithography, Spectrometers, Critical dimension metrology, Process control, Photoresist processing, Reflectivity, Integrated circuits

Read Abstract +

Proceedings Article | 10 March 2006 Paper

Real-time spatial control of steady-state wafer temperature during thermal processing in microlithography

Arthur Tay, Ying Zhou, Kuen-Yu Tsai, Weng-Khuen Ho, Ni Hu

Proceedings Volume 6155, 61550A (2006) https://doi.org/10.1117/12.654741

KEYWORDS: Semiconducting wafers, Optical lithography, Control systems, Thermal modeling, Resistance, Temperature sensors, Photoresist processing, Sensors, Process control, Critical dimension metrology

Read Abstract +

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years