Ni Hu
at National Univ of Singapore
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 14 November 2007
Proc. SPIE. 6790, MIPPR 2007: Remote Sensing and GIS Data Processing and Applications; and Innovative Multispectral Technology and Applications
KEYWORDS: Methane, MODIS, Remote sensing, Gases, Oxygen, Transmittance, Ozone, Carbon monoxide, Atmospheric particles, Atmospheric modeling

Proceedings Article | 5 April 2007
Proc. SPIE. 6518, Metrology, Inspection, and Process Control for Microlithography XXI
KEYWORDS: Lithography, Spectrometers, Reflectivity, Photoresist materials, Process control, Integrated circuits, Critical dimension metrology, Photoresist processing, Semiconducting wafers, Photoresist developing

Proceedings Article | 10 March 2006
Proc. SPIE. 6155, Data Analysis and Modeling for Process Control III
KEYWORDS: Optical lithography, Sensors, Resistance, Control systems, Temperature sensors, Process control, Critical dimension metrology, Photoresist processing, Semiconducting wafers, Thermal modeling

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