Dr. Niansheng Qi
at L3Harris Technologies Inc
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 13 May 1994
Proc. SPIE. 2194, Electron-Beam, X-Ray, and Ion-Beam Submicrometer Lithographies for Manufacturing IV
KEYWORDS: Lithography, Electrodes, X-rays, X-ray sources, Head, Diodes, Aluminum, Neon, X-ray lithography, Plasma

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