Dr. Nicholas V. LiCausi
SPIE Involvement:
Publications (3)

Proceedings Article | 20 March 2018 Paper
Nicholas LiCausi, James C.-H. Chen, R. S. Smith, E. Todd Ryan
Proceedings Volume 10588, 1058804 (2018) https://doi.org/10.1117/12.2297117
KEYWORDS: Optical lithography, Monte Carlo methods, Resistance, Capacitance, Lithography, Line edge roughness, Line width roughness, Double patterning technology

Proceedings Article | 17 April 2012 Paper
U. Okoroanyanwu, J. Heumann, X. Zhu, C. Clifford, F. Jiang, P. Mangat, R. Ghaskadavi, E. Mohn, R. Moses, O. Wood, H. Rolff, T. Schedel, R. Cantrell, P. Nesladek, N. LiCausi, X. Cai, W. Taylor, J. Schefske, M. Bender, N. Schmidt
Proceedings Volume 8352, 83520V (2012) https://doi.org/10.1117/12.923134
KEYWORDS: Photomasks, Inspection, Semiconducting wafers, Optical inspection, Extreme ultraviolet, Reflectivity, Defect detection, Mirrors, Scanning electron microscopy, Defect inspection

Proceedings Article | 4 September 2008 Paper
Nicholas LiCausi, Justin Dingley, Yaron Danon, Jian-Qiang Lu, Ishwara Bhat
Proceedings Volume 7079, 707908 (2008) https://doi.org/10.1117/12.797036
KEYWORDS: Sensors, Silicon, Boron, Capacitance, Deep reactive ion etching, Etching, Monte Carlo methods, Particles, Semiconducting wafers, Ions

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