Nickolas L. Brakensiek
Prinicpal Applications Engineer at Brewer Science Inc
SPIE Involvement:
Author
Publications (18)

Proceedings Article | 20 March 2018
Proc. SPIE. 10589, Advanced Etch Technology for Nanopatterning VII
KEYWORDS: Etching, Carbon monoxide, Chemistry, Plasma etching, Oxygen, Plasma, Directed self assembly, Nitrogen

Proceedings Article | 3 May 2017
Proc. SPIE. 10147, Optical Microlithography XXX
KEYWORDS: Optical lithography, Current controlled current source, Computed tomography, Reflectivity, Lithography

Proceedings Article | 16 April 2013
Proc. SPIE. 8682, Advances in Resist Materials and Processing Technology XXX
KEYWORDS: Air contamination, Semiconducting wafers, Chemistry, Thin film coatings, Lithography, Intelligence systems, Defect detection, Multilayers, Signal to noise ratio, Optical lithography

Proceedings Article | 29 March 2013
Proc. SPIE. 8682, Advances in Resist Materials and Processing Technology XXX
KEYWORDS: Semiconducting wafers, Particles, Chemical elements, Lithography, Silicon, Metrology, Microfluidics, Chemistry, Solids, Carbon

Proceedings Article | 16 April 2011
Proc. SPIE. 7972, Advances in Resist Materials and Processing Technology XXVIII
KEYWORDS: Semiconducting wafers, Manufacturing, Materials processing, Lithography, Industrial chemicals, Photoresist materials, Photoresist developing, Optical lithography, Bottom antireflective coatings, Wafer testing

Showing 5 of 18 publications
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