Nick Grupido
at Rigaku Innovative Technologies Inc
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 5 June 1998 Paper
Proc. SPIE. 3331, Emerging Lithographic Technologies II
KEYWORDS: Wafer-level optics, Mirrors, Optical design, Photomasks, Extreme ultraviolet lithography, Optical alignment, Synchrotron radiation, Semiconducting wafers, Tolerancing, Assembly tolerances

Proceedings Article | 1 November 1997 Paper
Proc. SPIE. 3152, Materials, Manufacturing, and Measurement for Synchrotron Radiation Mirrors
KEYWORDS: Mirrors, Multilayers, Sputter deposition, X-rays, Silicon, Coating, Reflectivity, Angiography, Synchrotrons, Silicon carbide

Proceedings Article | 4 October 1994 Paper
Proc. SPIE. 2270, NASA/SPIE Conference on Spin-Off Technologies from NASA for Commercial Sensors and Scientific Applications
KEYWORDS: Microscopes, Mirrors, Multilayers, X-ray optics, X-rays, Optical coatings, Reflectivity, Spatial resolution, X-ray imaging, X-ray telescopes

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