Prof. Nico F. de Rooij
Director at Ecole Polytechnique Fédérale de Lausanne
SPIE Involvement:
Conference Program Committee | Author
Publications (58)

PROCEEDINGS ARTICLE | November 21, 2017
Proc. SPIE. 10567, International Conference on Space Optics — ICSO 2006
KEYWORDS: Actuators, Mirrors, Aerospace engineering, Electrodes, Polymers, Deformable mirrors, Space telescopes, Microopto electromechanical systems, Micromirrors, Molybdenum

PROCEEDINGS ARTICLE | March 9, 2013
Proc. SPIE. 8614, Reliability, Packaging, Testing, and Characterization of MOEMS/MEMS and Nanodevices XII
KEYWORDS: Microelectromechanical systems, Gold, Electronics, Resonators, Glasses, Silicon, Aluminum, Semiconducting wafers, Nanoelectromechanical systems, Wafer bonding

PROCEEDINGS ARTICLE | March 9, 2013
Proc. SPIE. 8614, Reliability, Packaging, Testing, and Characterization of MOEMS/MEMS and Nanodevices XII
KEYWORDS: Light sources, Electrodes, Dielectrics, Reliability, Lamps, Atomic clocks, Microfabrication, Optical pumping, Rubidium, Plasma

PROCEEDINGS ARTICLE | September 13, 2012
Proc. SPIE. 8450, Modern Technologies in Space- and Ground-based Telescopes and Instrumentation II
KEYWORDS: Gold, Mirrors, Electrodes, Space telescopes, Micromirrors, Astronomical imaging, Molybdenum, Semiconducting wafers, Cryogenics, Wafer bonding

PROCEEDINGS ARTICLE | February 16, 2012
Proc. SPIE. 8252, MOEMS and Miniaturized Systems XI
KEYWORDS: Optical components, Optical design, Modulation, Silica, Electrodes, Reflectivity, Velocity measurements, Optical arrays, Camera shutters, Reflective displays

PROCEEDINGS ARTICLE | February 16, 2012
Proc. SPIE. 8252, MOEMS and Miniaturized Systems XI
KEYWORDS: Gold, Mirrors, Electrodes, Coating, Reflectivity, Micromirrors, Astronomical imaging, Semiconducting wafers, Cryogenics, Wafer bonding

Showing 5 of 58 publications
Conference Committee Involvement (11)
Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems IV
10 December 2008 | Melbourne, Australia
Smart Sensors, Actuators and MEMS
2 May 2007 | Maspalomas, Gran Canaria, Spain
Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems III
11 December 2006 | Adelaide, Australia
Nanomaterial Synthesis and Integration for Sensors, Electronics, Photonics, and Electro-Optics
1 October 2006 | Boston, Massachusetts, United States
Device and Process Technologies for Microelectronics, MEMS, and Photonics IV
12 December 2005 | Brisbane, Australia
Showing 5 of 11 published special sections
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