Dr. Nicola Murphy
at Univ College Dublin
SPIE Involvement:
Author
Publications (6)

Proceedings Article | 3 June 2005
Proc. SPIE. 5826, Opto-Ireland 2005: Optical Sensing and Spectroscopy
KEYWORDS: Oscillators, Ions, Xenon, Ionization, Extreme ultraviolet, Pulsed laser operation, Digital Light Processing, Plasma, Tin, Absorption

Proceedings Article | 3 June 2005
Proc. SPIE. 5826, Opto-Ireland 2005: Optical Sensing and Spectroscopy
KEYWORDS: Lithography, Spectrographs, Ceramics, Ions, Xenon, Extreme ultraviolet, Extreme ultraviolet lithography, Pulsed laser operation, Plasma, Tin

Proceedings Article | 3 June 2005
Proc. SPIE. 5826, Opto-Ireland 2005: Optical Sensing and Spectroscopy
KEYWORDS: Spectrographs, Electrons, Ions, Nd:YAG lasers, Iodine, Extreme ultraviolet, Lanthanum, Barium, Plasma, Absorption

Proceedings Article | 3 June 2005
Proc. SPIE. 5826, Opto-Ireland 2005: Optical Sensing and Spectroscopy
KEYWORDS: Oscillators, Chemical species, Spectroscopy, Tungsten, Ions, Ionization, Extreme ultraviolet, Tellurium, Plasma, Absorption

Proceedings Article | 6 May 2005
Proc. SPIE. 5751, Emerging Lithographic Technologies IX
KEYWORDS: Spectrographs, Calibration, Chemical species, Electrons, Ions, Plasmas, Nd:YAG lasers, Extreme ultraviolet, Grazing incidence, Tin

Showing 5 of 6 publications
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