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Nicolas Ayotte
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Publications (1)
Proceedings Article | 11 October 2013 Paper
Single-etch step grating couplers for SOI waveguides
Nicolas Ayotte, Kéven Bédard, Sophie LaRochelle
Proceedings Volume 8915, 89150X (2013) https://doi.org/10.1117/12.2042095
KEYWORDS: Optical design, Waveguides, Refractive index, Silicon, Apodization, Lithography, Deep ultraviolet, Semiconducting wafers, Photonics, Optical fibers
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