Dr. Nicolas Benoit
Coating Technology at Carl Zeiss Sports Optics GmbH
SPIE Involvement:
Author
Publications (9)

PROCEEDINGS ARTICLE | September 3, 2008
Proc. SPIE. 7077, Advances in X-Ray/EUV Optics and Components III
KEYWORDS: Reflectivity, Mirrors, Coating, Extreme ultraviolet, Multilayers, Silicon, Molybdenum, Annealing, Interfaces, Plasma

PROCEEDINGS ARTICLE | March 21, 2008
Proc. SPIE. 6921, Emerging Lithographic Technologies XII
KEYWORDS: Scattering, Reflectivity, Coating, Mirrors, Multilayers, Extreme ultraviolet, Interfaces, Scatter measurement, EUV optics, Autoregressive models

PROCEEDINGS ARTICLE | March 20, 2008
Proc. SPIE. 6921, Emerging Lithographic Technologies XII
KEYWORDS: Reflectivity, Multilayers, Mirrors, Extreme ultraviolet lithography, Silicon, Carbon, Molybdenum, Extreme ultraviolet, Oxidation, Titanium dioxide

PROCEEDINGS ARTICLE | August 29, 2006
Proc. SPIE. 6317, Advances in X-Ray/EUV Optics, Components, and Applications
KEYWORDS: Mirrors, Reflectivity, Annealing, Silicon, Extreme ultraviolet, Multilayers, Molybdenum, Interfaces, Extreme ultraviolet lithography, Oxidation

PROCEEDINGS ARTICLE | March 24, 2006
Proc. SPIE. 6151, Emerging Lithographic Technologies X
KEYWORDS: Mirrors, Reflectivity, Multilayers, Coating, Extreme ultraviolet, Silicon, Annealing, Atomic force microscopy, Silicon carbide, Temperature metrology

PROCEEDINGS ARTICLE | October 5, 2005
Proc. SPIE. 5963, Advances in Optical Thin Films II
KEYWORDS: Reflectivity, Silicon carbide, Multilayers, Mirrors, Interfaces, Carbon, Annealing, Extreme ultraviolet lithography, Diffusion, Silicon

Showing 5 of 9 publications
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