Dr. Nicolas Benoit
Coating Technology at Carl Zeiss Sports Optics GmbH
SPIE Involvement:
Author
Publications (9)

PROCEEDINGS ARTICLE | September 3, 2008
Proc. SPIE. 7077, Advances in X-Ray/EUV Optics and Components III
KEYWORDS: Mirrors, Multilayers, Annealing, Interfaces, Silicon, Coating, Reflectivity, Extreme ultraviolet, Molybdenum, Plasma

PROCEEDINGS ARTICLE | March 21, 2008
Proc. SPIE. 6921, Emerging Lithographic Technologies XII
KEYWORDS: Mirrors, Multilayers, Scattering, Interfaces, Coating, Reflectivity, Extreme ultraviolet, Scatter measurement, Autoregressive models, EUV optics

PROCEEDINGS ARTICLE | March 20, 2008
Proc. SPIE. 6921, Emerging Lithographic Technologies XII
KEYWORDS: Carbon, Mirrors, Multilayers, Titanium dioxide, Silicon, Reflectivity, Extreme ultraviolet, Extreme ultraviolet lithography, Molybdenum, Oxidation

PROCEEDINGS ARTICLE | August 29, 2006
Proc. SPIE. 6317, Advances in X-Ray/EUV Optics, Components, and Applications
KEYWORDS: Mirrors, Multilayers, Annealing, Interfaces, Silicon, Reflectivity, Extreme ultraviolet, Extreme ultraviolet lithography, Molybdenum, Oxidation

PROCEEDINGS ARTICLE | March 24, 2006
Proc. SPIE. 6151, Emerging Lithographic Technologies X
KEYWORDS: Mirrors, Multilayers, Annealing, Silicon, Coating, Reflectivity, Atomic force microscopy, Extreme ultraviolet, Silicon carbide, Temperature metrology

PROCEEDINGS ARTICLE | October 5, 2005
Proc. SPIE. 5963, Advances in Optical Thin Films II
KEYWORDS: Carbon, Mirrors, Multilayers, Annealing, Interfaces, Silicon, Diffusion, Reflectivity, Extreme ultraviolet lithography, Silicon carbide

Showing 5 of 9 publications
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