Dr. Nicolas Passilly Profile

Dr. Nicolas Passilly

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Publications (27)

Proceedings Article | 1 March 2019 Presentation + Paper

Advanced microfabrication technologies for miniature caesium vapor cells for atomic clocks

C. Gorecki, V. Maurice, R. Boudot, S. Bargiel, N. Passilly, R. Chutani, R. Vicarini, S. Galliou

Proceedings Volume 10934, 109342F (2019) https://doi.org/10.1117/12.2506225

KEYWORDS: Cesium, Glasses, Clocks, Atomic clocks, Silicon, Semiconducting wafers, Microfabrication, Neon, Vertical cavity surface emitting lasers, Metrology

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Proceedings Article | 7 September 2018 Paper

MOEMS-based imaging probe with integrated Mirau micro-interferometer and MEMS microscanner for swept-source OCT endomicroscopy

C. Gorecki, P. Struk, S. Bargiel, Q. Tanguy, N. Passilly

Proceedings Volume 10834, 108340M (2018) https://doi.org/10.1117/12.2319084

KEYWORDS: Microelectromechanical systems, Optical coherence tomography, Microopto electromechanical systems, Interferometry, Mirau interferometers, Scanners, Objectives, GRIN lenses, Glasses, Endomicroscopy

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Proceedings Article | 24 May 2018 Presentation + Paper

The SS-OCT endomicroscopy probe based on MOEMS Mirau micro-interferometer for early stomach cancer detection

Przemyslaw Struk, Sylwester Bargiel, Quentin A. Tanguy, Christophe Gorecki, Huikai Xie, Ravinder Chutani, Nicolas Passilly, Alain Billard

Proceedings Volume 10678, 1067807 (2018) https://doi.org/10.1117/12.2311298

KEYWORDS: Microopto electromechanical systems, Optical coherence tomography, Scanners, Micromirrors, Stomach, Microelectromechanical systems, Glasses, Endomicroscopy, Cancer, GRIN lenses

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Proceedings Article | 24 May 2018 Paper

Micro Glass Blowing platform for microfabrication of microoptical components

C. Gorecki, J. Vincente Carrion, N. Passilly, S. Bargiel

Proceedings Volume 10678, 1067814 (2018) https://doi.org/10.1117/12.2311305

KEYWORDS: Axicons, Glasses, Bessel beams, Silicon, Semiconducting wafers, Microfabrication, Micromachining, Wafer bonding, Fabrication, Microlens

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Proceedings Article | 27 April 2016 Paper

Wafer-level fabrication of arrays of glass lens doublets

Nicolas Passilly, Stéphane Perrin, Jorge Albero, Johann Krauter, Olivier Gaiffe, Ludovic Gauthier-Manuel, Luc Froehly, Justine Lullin, Sylwester Bargiel, Wolfgang Osten, Christophe Gorecki

Proceedings Volume 9888, 98880T (2016) https://doi.org/10.1117/12.2228833

KEYWORDS: Optical components, Polishing, Micro optics, Glasses, Optical aberrations, Semiconducting wafers, Microlens

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Systems for imaging require to employ high quality optical components in order to dispose of optical aberrations and thus reach sufficient resolution. However, well-known methods to get rid of optical aberrations, such as aspherical profiles or diffractive corrections are not easy to apply to micro-optics. In particular, some of these methods rely on polymers which cannot be associated when such lenses are to be used in integrated devices requiring high temperature process for their further assembly and separation. Among the different approaches, the most common is the lens splitting that consists in dividing the focusing power between two or more optical components. In here, we propose to take advantage of a wafer-level technique, devoted to the generation of glass lenses, which involves thermal reflow in silicon cavities to generate lens doublets. After the convex lens sides are generated, grinding and polishing of both stack sides allow, on the first hand, to form the planar lens backside and, on the other hand, to open the silicon cavity. Nevertheless, silicon frames are then kept and thinned down to form well-controlled and auto-aligned spacers between the lenses. Subsequent accurate vertical assembly of the glass lens arrays is performed by anodic bonding. The latter ensures a high level of alignment both laterally and axially since no additional material is required. Thanks to polishing, the generated lens doublets are then as thin as several hundreds of microns and compatible with micro-opto-electro-systems (MOEMS) technologies since they are only made of glass and silicon. The generated optical module is then robust and provide improved optical performances. Indeed, theoretically, two stacked lenses with similar features and spherical profiles can be almost diffraction limited whereas a single lens characterized by the same numerical aperture than the doublet presents five times higher wavefront error. To demonstrate such assumption, we fabricated glass lens doublets and compared them to single lenses of equivalent focusing power. For similar illumination, the optical aberrations are significantly reduced.

Proceedings Article | 26 April 2016 Paper

Vertical comb-drive microscanner with 4x4 array of micromirrors for phase-shifting Mirau microinterferometry

Sylwester Bargiel, Justine Lullin, Patrice Lemoal, Stéphane Perrin, Nicolas Passilly, Jorge Albero, Luc Froehly, Franck Lardet-Vieudrin, Christophe Gorecki

Proceedings Volume 9890, 98900D (2016) https://doi.org/10.1117/12.2230487

KEYWORDS: Micromirrors, Silicon, Interferometry, Optical coherence tomography, Phase shifts, Microopto electromechanical systems, Microactuators, Phase shifting, Mirau interferometers, Semiconducting wafers, Photomasks, Etching

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Proceedings Article | 26 April 2016 Paper

Array-type miniature interferometer as the core optical microsystem of an optical coherence tomography device for tissue inspection

Nicolas Passilly, Stéphane Perrin, Justine Lullin, Jorge Albero, Sylwester Bargiel, Luc Froehly, Christophe Gorecki, Johann Krauter, Wolfgang Osten, Wei-Shan Wang, Maik Wiemer

Proceedings Volume 9890, 98900C (2016) https://doi.org/10.1117/12.2229477

KEYWORDS: Skin, Microopto electromechanical systems, Optical coherence tomography, Microsystems, Mirrors, Silicon, Semiconducting wafers, Beam splitters

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Proceedings Article | 26 April 2016 Paper

Aberration retrieval for the characterization of micro-optical components

Stephane Perrin, Nicolas Passilly, Luc Froehly, Christophe Gorecki

Proceedings Volume 9890, 98901A (2016) https://doi.org/10.1117/12.2228847

KEYWORDS: Wavefronts, Phase retrieval, Microlens, Interferometry, Micro optics, Metrology, Optical components, Optical properties, Optical aberrations, Imaging systems, Digital holography, Microscopes, Objectives, Wave propagation

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Proceedings Article | 26 April 2016 Paper

Vertical integration of array-type miniature interferometers at wafer level by using multistack anodic bonding

Wei-Shan Wang, Maik Wiemer, Joerg Froemel, Tom Enderlein, Thomas Gessner, Justine Lullin, Sylwester Bargiel, Nicolas Passilly, Jorge Albero, Christophe Gorecki

Proceedings Volume 9890, 989011 (2016) https://doi.org/10.1117/12.2229884

KEYWORDS: Semiconducting wafers, Interferometers, Microelectromechanical systems, Microlens, Mirau interferometers, Wafer bonding, Microopto electromechanical systems, Optical coherence tomography, Scanners, Beam splitters, Laser cutting, Gold, Glasses

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Proceedings Article | 1 September 2015 Paper

Performance analysis of a full-field and full-range swept-source OCT system

J. Krauter, T. Boettcher, K. Körner, M. Gronle, W. Osten, N. Passilly, L. Froehly, S. Perrin, C. Gorecki

Proceedings Volume 9576, 957609 (2015) https://doi.org/10.1117/12.2189885

KEYWORDS: Optical coherence tomography, Mirrors, Sensors, Light sources, Cameras, Imaging systems, Objectives, Signal processing, Optical imaging, Beam splitters

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Proceedings Article | 22 June 2015 Paper

Full-field swept-source optical coherence tomography with phase-shifting techniques for skin cancer detection

J. Krauter, T. Boettcher, K. Körner, M. Gronle, W. Osten, N. Passilly, L. Froehly, S. Perrin, C. Gorecki

Proceedings Volume 9529, 952913 (2015) https://doi.org/10.1117/12.2189278

KEYWORDS: Optical coherence tomography, Cameras, Phase shifts, Mirrors, Light sources, Signal to noise ratio, Skin cancer, Molybdenum, Interferometers, Phase shifting

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Proceedings Article | 27 February 2015 Paper

Technological platform for vertical multi-wafer integration of miniature imaging instruments

S. Bargiel, M. Baranski, N. Passilly, C. Gorecki, M. Wiemer, J. Frömel, D. Wünsch, W. Wang

Proceedings Volume 9375, 93750L (2015) https://doi.org/10.1117/12.2078007

KEYWORDS: Glasses, Silicon, Microlens, Semiconducting wafers, Wafer-level optics, Confocal microscopy, Etching, Microscopes, Microopto electromechanical systems, Beam splitters

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Proceedings Article | 27 February 2015 Paper

Multi-wafer bonding technology for the integration of a micromachined Mirau interferometer

Wei-Shan Wang, Justine Lullin, Joerg Froemel, Maik Wiemer, Sylwester Bargiel, Nicolas Passilly, Christophe Gorecki, Thomas Gessner

Proceedings Volume 9375, 93750P (2015) https://doi.org/10.1117/12.2077641

KEYWORDS: Semiconducting wafers, Wafer bonding, Interfaces, Mirau interferometers, Microopto electromechanical systems, Microlens, Glasses, Silicon, Optical coherence tomography, Wafer-level optics

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Proceedings Article | 18 August 2014 Paper

Simple setup for optical characterization of microlenses

Stephane Perrin, Maciej Baranski, Nicolas Passilly, Luc Froehly, Jorge Albero, Sylwester Bargiel, Christophe Gorecki

Proceedings Volume 9204, 92040D (2014) https://doi.org/10.1117/12.2061299

KEYWORDS: Microlens, Modulation transfer functions, Imaging systems, Optical components, Microscopes, Objectives, Molybdenum, Wavefronts, 3D metrology, Etching

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Proceedings Article | 2 May 2014 Paper

Arrays of millimeter-sized glass lenses for miniature inspection systems

J. Albero, S. Perrin, S. Bargiel, M. Baranski, N. Passilly, L. Gauthier-Manuel, C. Gorecki

Proceedings Volume 9130, 91300U (2014) https://doi.org/10.1117/12.2051043

KEYWORDS: Glasses, Microlens, Silicon, Lenses, Inspection, Semiconducting wafers, Fabrication, Matrices, Microlens array, Deep reactive ion etching

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Proceedings Article | 1 May 2014 Paper

Optical design of a vertically integrated array-type Mirau-based OCT system

J. Krauter, T. Boettcher, W. Lyda, W. Osten, N. Passilly, L. Froehly, S. Bargiel, J. Albero, S. Perrin, J. Lullin, C. Gorecki

Proceedings Volume 9132, 91320L (2014) https://doi.org/10.1117/12.2054573

KEYWORDS: Optical coherence tomography, Interferometers, Optical design, Skin, Beam splitters, Sensors, Cameras, Imaging systems, Electroluminescent displays, Tissue optics

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Proceedings Article | 1 May 2014 Paper

Metrology of micro-optical components quality using direct measurement of 3D intensity point spread function

Maciej Baranski, Stephane Perrin, Nicolas Passilly, Luc Froehly, Sylwester Bargiel, Jorge Albero, Christophe Gorecki

Proceedings Volume 9132, 913216 (2014) https://doi.org/10.1117/12.2051122

KEYWORDS: 3D metrology, Optical components, Objectives, Imaging systems, Point spread functions, Microscopes, Cameras, Microlens, CMOS cameras, High dynamic range imaging

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Proceedings Article | 13 March 2013 Paper

3D micro-optical lens scanner made by multi-wafer bonding technology

S. Bargiel, C. Gorecki, M. Barański, N. Passilly, M. Wiemer, C. Jia, J. Frömel

Proceedings Volume 8616, 861605 (2013) https://doi.org/10.1117/12.2002422

KEYWORDS: Microlens, Glasses, Silicon, Semiconducting wafers, 3D scanning, Wafer bonding, Scanners, Microactuators, Microscopes, Ceramics

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Proceedings Article | 13 September 2012 Paper

Micromachined array-type Mirau interferometer for MEMS metrology

C. Gorecki, S. Bargiel, J. Albero, N. Passilly, M. Kujawinska, U. Zeitner

Proceedings Volume 8494, 849403 (2012) https://doi.org/10.1117/12.932226

KEYWORDS: Semiconducting wafers, Microelectromechanical systems, Mirau interferometers, Interferometry, Glasses, Microlens, Interferometers, Micromirrors, Beam splitters, Inspection

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Proceedings Article | 9 May 2012 Paper

Fabrication of 100% fill factor arrays of microlenses from silicon molds

Maciej Baranski, Nicolas Passilly, Jorge Albero, Christophe Gorecki

Proceedings Volume 8428, 84281G (2012) https://doi.org/10.1117/12.921875

KEYWORDS: Microlens, Etching, Silicon, Microlens array, Lenses, Wet etching, Spherical lenses, Semiconducting wafers, Matrices, Chemical elements

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Proceedings Article | 7 September 2011 Paper

Generation of pure TEMp0 modes using a friendly intracavity laser beam shaping technique

Emmanuel Cagniot, Michael Fromager, Thomas Godin, Nicolas Passilly, Marc Brunel, Kamel Aït-Ameur

Proceedings Volume 8130, 813006 (2011) https://doi.org/10.1117/12.892146

KEYWORDS: Mirrors, Resonators, Crystals, Beam shaping, Lithium, Diffractive optical elements, Laser resonators, Lenses, Optimization (mathematics), Beam propagation method

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Proceedings Article | 24 August 2009 Paper

Some applications of binary Diffractive Optical Elements

K. Aït-Ameur, N. Passilly, M. Fromager, E. Cagniot

Proceedings Volume 7430, 74300P (2009) https://doi.org/10.1117/12.828143

KEYWORDS: Diffractive optical elements, Transmission electron microscopy, Polarization, Binary data, Beam propagation method, Diffraction, Beam shaping, Mirrors, Phase shifts, Gaussian beams

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Proceedings Article | 14 May 2008 Paper

DUV phase mask for 100 nm period grating printing

Y. Jourlin, Y. Bourgin, S. Reynaud, O. Parriaux, A. Talneau, P. Karvinen, N. Passilly, A. Md. Zain, R. De La Rue

Proceedings Volume 6992, 69920C (2008) https://doi.org/10.1117/12.783390

KEYWORDS: Photomasks, Refractive index, Microelectronics, Silicon, Printing, Water, Etching, Deep ultraviolet, Diffraction, Lithography

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Proceedings Article | 9 June 2006 Paper

Use of simple diffractive optics for improving the dynamics of a self-Q-switched Cr:LiSAF laser

N. Passilly, M. Fromager, K. Aït-Ameur

Proceedings Volume 6054, 60540R (2006) https://doi.org/10.1117/12.660811

KEYWORDS: Mirrors, Pulsed laser operation, Rod lasers, Diffraction, Diffractive optical elements, Refractive index, Ions, Laser applications, Laser resonators, Q switches

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Proceedings Article | 1 September 2004 Paper

Experimental and theoretical investigation of a nonlinear lensing effect observed in a Cr:LiSAF laser

Nicolas Passilly, Michael Fromager, Kamel Ait-Ameur, Richard Moncorge, Jean-Louis Doualan, Antoine Hirth, Greg Quarles

Proceedings Volume 5460, (2004) https://doi.org/10.1117/12.545009

KEYWORDS: Refractive index, Ions, Rod lasers, Chromium, Mirrors, Polarizability, Pulsed laser operation, Oscillators, Diagnostics, Photodiodes

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Proceedings Article | 1 September 2004 Paper

The phase slit: a new laser component

Nicolas Passilly, Laurence Mechin, Chantal Gunther, Kamel Ait-Ameur

Proceedings Volume 5456, (2004) https://doi.org/10.1117/12.545101

KEYWORDS: Gaussian beams, Beam shaping, Diffraction, Diffractive optical elements, Near field, Laser components, Glasses, Phase shifting, Binary data, Annealing

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Proceedings Article | 1 September 2004 Paper

Brightness of diffracted laser beams

Nicolas Passilly, Gilles Martel, Kamel Ait-Ameur

Proceedings Volume 5456, (2004) https://doi.org/10.1117/12.545040

KEYWORDS: Laser beam propagation, Beam propagation method, Gaussian beams, Optical components, Laser applications, Superposition, Ion lasers, High power lasers, Resonators, Two wave mixing

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Showing 5 of 27 publications

Conference Committee Involvement (5)

Optics and Photonics for Advanced Dimensional Metrology II

5 April 2022 | Strasbourg, France

Optics and Photonics for Advanced Dimensional Metrology

6 April 2020 | Online Only, France

Optical Micro- and Nanometrology

25 April 2018 | Strasbourg, France

Optical Micro- and Nanometrology

5 April 2016 | Brussels, Belgium

Optical Micro- and Nanometrology

15 April 2014 | Brussels, Belgium

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