Dr. Nicole Saulnier
at IBM Thomas J Watson Research Ctr
SPIE Involvement:
Publications (13)

Proceedings Article | 24 March 2020 Presentation
Iqbal Saraf, Shyam Sridhar, Christopher Catano, Sergey Voronin, Dexin Kong, Soon-Cheon Seo, Youngseok Kim, Takashi Ando, Nicole Saulnier, Vijay Narayanan
Proceedings Volume 11329, 113290N (2020) https://doi.org/10.1117/12.2552035

Proceedings Article | 30 March 2017 Presentation + Paper
Michael Crouse, Lars Liebmann, Vince Plachecki, Mohamed Salama, Yulu Chen, Nicole Saulnier, Derren Dunn, Itty Matthew, Stephen Hsu, Keith Gronlund, Francis Goodwin
Proceedings Volume 10148, 101480H (2017) https://doi.org/10.1117/12.2260865
KEYWORDS: Extreme ultraviolet, Extreme ultraviolet lithography, Stochastic processes, Optical lithography, Lithography, Tolerancing, Computational lithography, Design for manufacturability, Manufacturing, Back end of line, Source mask optimization, Photomasks, Logic, Optical proximity correction, Nanoimprint lithography

Proceedings Article | 28 March 2017 Paper
Proceedings Volume 10145, 1014511 (2017) https://doi.org/10.1117/12.2258196
KEYWORDS: Line width roughness, Metrology, Edge roughness, Optical metrology, Process control, Line edge roughness, Semiconductors, Modeling, Scanning electron microscopy, Critical dimension metrology, Semiconducting wafers, Photomasks, 3D modeling, Extreme ultraviolet, Modulation

Proceedings Article | 24 March 2017 Paper
Proceedings Volume 10143, 101431A (2017) https://doi.org/10.1117/12.2258194
KEYWORDS: Line width roughness, Edge roughness, Lithography, Extreme ultraviolet lithography, Line edge roughness, Metrology, Photomasks, Semiconducting wafers, Semiconductors, Optical imaging, Photoresist processing, Etching, Extreme ultraviolet, Modulation

Proceedings Article | 24 March 2017 Presentation + Paper
Proceedings Volume 10143, 101431G (2017) https://doi.org/10.1117/12.2261216
KEYWORDS: Optical lithography, Extreme ultraviolet lithography, Extreme ultraviolet, Lithography, Materials processing, Photoresist processing, Etching, Metals, Quantum efficiency, Photoresist materials, Interfaces, Silicon

Showing 5 of 13 publications
  • View contact details

Is this your profile? Update it now.
Don’t have a profile and want one?

Back to Top