Niculae N. Dumbravescu
at IMT Bucharest
SPIE Involvement:
Publications (9)

Proceedings Article | 30 December 2003
Proc. SPIE. 5342, Micromachining and Microfabrication Process Technology IX
KEYWORDS: Gold, Lithography, Reticles, Etching, Silicon, Reliability, Photomasks, Micromachining, Silicon carbide, Semiconducting wafers

Proceedings Article | 19 November 2003
Proc. SPIE. 4829, 19th Congress of the International Commission for Optics: Optics for the Quality of Life
KEYWORDS: Lithography, Reticles, Polymethylmethacrylate, Glasses, X-rays, Nickel, Silicon, Scanning electron microscopy, Micro optics, Diffraction gratings

Proceedings Article | 30 September 2003
Proc. SPIE. 5227, Advanced Topics in Optoelectronics, Microelectronics, and Nanotechnologies
KEYWORDS: Lithography, Diffraction, Reticles, Modulation, Glasses, Ultraviolet radiation, Micro optics, Photomasks, Photoresist processing, Binary data

Proceedings Article | 18 August 2000
Proc. SPIE. 4179, Micromachining Technology for Micro-Optics
KEYWORDS: Lithography, Reticles, Metals, X-rays, Ions, Photoresist materials, Photomasks, Electroplating, X-ray lithography, Binary data

Proceedings Article | 10 April 2000
Proc. SPIE. 4019, Design, Test, Integration, and Packaging of MEMS/MOEMS
KEYWORDS: Lithography, Reticles, X-ray optics, Modulation, Glasses, Silver, Scanning electron microscopy, Photomasks, Photomicroscopy, Binary data

Showing 5 of 9 publications
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