Dr. Nigel C. E. Crosland
Senior Scientist at Vistec Gaussian Beam Lithography
SPIE Involvement:
Publications (3)

Proceedings Article | 28 March 2014 Paper
James Smith, Nigel Crosland, Samuel Doran, Robert Dowling, John Hartley, Philip Hoyle, David M. King, Lawrence Kutcher, Andrew McClelland, Martin Turnidge
Proceedings Volume 9049, 90490O (2014) https://doi.org/10.1117/12.2046609
KEYWORDS: Lithography, Double patterning technology, Analog electronics, Clocks, Photomicroscopy, Beam shaping, Computer programming, Semiconducting wafers, Metals, Metrology

Proceedings Article | 26 March 2013 Paper
John Hartley, Nigel Crosland, Robert Dowling, Philip Hoyle, Andrew McClelland, Martin Turnidge, James Smith
Proceedings Volume 8680, 86800P (2013) https://doi.org/10.1117/12.2011664
KEYWORDS: Lithography, Semiconducting wafers, Zone plates, Computer programming, Beam shaping, Data conversion, Metals, Photomicroscopy, Metrology, Time metrology

Proceedings Article | 3 April 2010 Paper
J. Hartley, T. Groves, R. Bonam, A. Raghunathan, J. Ruan, A. McClelland, N. Crosland, J. Cunanan, K. Han
Proceedings Volume 7637, 76371Y (2010) https://doi.org/10.1117/12.848396
KEYWORDS: Semiconducting wafers, Electron beam lithography, Metals, Lithography, Contamination, X-ray fluorescence spectroscopy, Overlay metrology, Calibration, Monochromatic aberrations, X-rays

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